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Reliability testing and characterization of MEMS/MOEMS III : 26-28 January 2004 San Jose Califo
出版社：Bellingham, Wash. : SPIE, c2004.
ISBN：0819452513
出版年：2004
作者：Tanner,Danelle Mary,
资源类型：图书
细分类型：西文文献
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