Chemical-mechanical polishing 2001--advances and future challenges : symposium held April 18-20, 200

Chemical-mechanical polishing 2001--advances and future challenges : symposium held April 18-20 200

出版社：Warrendale, Pa. : Materials Research Society, c2001.

ISBN：1558996079

出版年：2001

作者：Babu,S. V.

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