Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S

Chemical-mechanical planarization : symposium held April 22-24 2003 San Francisco California U.S

出版社：Warrendale, Pa. : Materials Research Society, c2003.

ISBN：1558997040

出版年：2003

作者：Boning,Duane S.

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