Electron-beam, X-ray, and ion-beam technology : submicrometer lithographies VIII : 1-3 March 1989, S

Electron-beam X-ray and ion-beam technology : submicrometer lithographies VIII : 1-3 March 1989 S

出版社：Bellingham, Wash., USA : SPIE, c1989.

ISBN：0819401242

出版年：1989

作者：Yanof,Arnold W.

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ISBN：0819403105
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出版社：Bellingham : SPIE, 1985.
出版年：1985

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV : March 14-15, 1985

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ISBN：089252572X
出版社：Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1985.
出版年：1985

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ISBN：089252667X
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