Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing III : 1-2 March 199

Electron-beam X-ray and ion-beam submicrometer lithographies for manufacturing III : 1-2 March 199

出版社：Bellingham, Wash. : The Society, c1993.

ISBN：0819411582

出版年：1993

作者：Patterson,David O.

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