Reliability testing and characterization of MEMS/MOEMS : 22-24 Oct. 2001 San Francisco USA

出版社:Bellingham, Wash., USA : SPIE, c2001.
ISBN:0819442860
出版年:2001
作者:Ramesham,Rajeshuni,
资源类型:图书
细分类型:西文文献
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