MEMS/MOEMS components and their applications III : 23-25 January 2006 San Jose California USA

出版社:Bellingham, Wash. : SPIE--The International Society for Optical Engineering, c2006.
ISBN:0819461555
出版年:2006
作者:Henning,Albert Karl.
资源类型:图书
细分类型:西文文献
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