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Characterization and metrology for ULSI technology 2000 : International Conference Gaithersburg Ma
出版社：Woodbury, N.Y. : American Institute of Physics, 2001.
ISBN：156396967X
出版年：2001
作者：Seiler,David G,,
资源类型：图书,随书光盘
细分类型：西文文献,随书光盘
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