《European pair promise 'single-nanometer accuracy' patterning tool for optics》

  • 来源专题:上海光机所科技信息监测平台
  • 编译者: petrel
  • 发布时间:2017-10-16
  • European pair promise 'single-nanometer accuracy' patterning tool for optics. 11Oct2017 Semiconductor equipment firms SwissLitho and EV Group continue collaboration initiated under European research project. Zurich-based SwissLitho and Austria’s EV Group are working together to bring to market a new nanoimprint lithography (NIL) technique capable of making nanostructured optical components. The collaboration, which builds on earlier research carried out under a €17.6million project fund...

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    • 编译者:xuwenwhlib
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    • 来源专题:中科院西安光机所服务
    • 编译者:opt_weiz
    • 发布时间:2016-04-20
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