The Physics of Micro/Nano-Fabrication

EISBN:9781475767759
PISBN:9780306441462
出版社:Springer US
出版类型:Contributed volume
出版时间:1992
版次:1992
作者:Ivor Brodie,Julius J. Muray
主题词:Physics,Solid State Physics,Spectroscopy and Microscopy,Condensed Matter Physics,Crystallography and Scattering Methods,Electrical Engineering,Optical and Electronic Materials
语种:英语
丛书题名:Microdevices
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