Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

EISBN:9783319762944
PISBN:9783319762937
出版社:Springer International Publishing
出版类型:Monograph
出版时间:2018
版次:1st ed. 2018
作者:Seongbo Shim,Youngsoo Shin
主题词:Materials Science,Nanotechnology,Nanotechnology and Microengineering,Circuits and Systems,Optical and Electronic Materials,Nanoscale Science and Technology,Semiconductors
语种:英语
所属数据库:SpringerLink电子图书
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