Silicon front-end technology--materials processing and modelling : symposium held Apr. 13-15, 1998,

Silicon front-end technology--materials processing and modelling : symposium held Apr. 13-15 1998

出版社：Warrendale, Pa. : Materials Research Society, c1998.

ISBN：1558994386

出版年：1998

作者：Cowern,Nicholas E.B.,

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细分类型：西文文献

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