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Plasma synthesis and etching of electronic materials : symposium held November 27-30 1984 Boston

出版社：Pittsburgh, Pa. : Materials Research Society, c1985.
ISBN：0931837030
出版年：1985
作者：Symposium on Plasma Synthesis and Etching of Electronic Materials
资源类型：图书,期刊(装订的)
细分类型：西文文献
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