Handbook of thin-film deposition processes and techniques : principles methods equipment and appli

出版社:Norwich, N.Y. : Noyes Pub. ; William Andrew Pub., 2002.
ISBN:0815514425
出版年:2002
作者:Seshan,Krishna.
资源类型:图书,期刊(装订的)
细分类型:西文文献
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