2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawai

2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7 2002 Maui Hawai

出版社：Santa Clara, Calif. : American Vacuum Society, c2002.

ISBN：0965157776

出版年：2002

作者：International Symposium on Plasma- and Process-Induced Damage

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2001 6th International Symposium on Plasma- and Process-Induced Damage : May 13-15, 2001, Monterey,

作者：International Symposium on Plasma- and Process-Induced Damage
ISBN：096515775X
出版社：Santa Clara, Calif. : American Vacuum Society, c2001.
出版年：2001

2003 8th International Symposium on Plasma- and Process-Induced Damage : April 24-25, 2003, Corbeil-

作者：International Symposium on Plasma Process-Induced Damage
ISBN：0780377478
出版社：Santa Clara, Calif. : AVS, c2003.
出版年：2003

1998 3rd International Symposium on Plasma Process-Induced Damage : June 4-5, 1998, Honolulu, Hawaii

作者：International Symposium on Plasma Process-Induced Damage
ISBN：0965157725
出版社：Sunnyvale, CA : Northern California Chapter of the American Vacuum Society, c1998.
出版年：1998

2000 5th International Symposium on Plasma Process-Induced Damage, May 22-24, 2000, Santa Clara, Cal

作者：International Symposium on Plasma Process-Induced Damage
ISBN：0965157741
出版社：Santa Clara, Calif. : AVS, c2000.
出版年：2000

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ISBN：0819447277
出版社：Bellingham, Wash. : SPIE, c2003.
出版年：2003

P2ID 2001 : 6th international symposium on plasma-and process-induced damage.

作者：International Symposium on Plasma-and Process-Induced Damage
ISBN：096515775X
出版社：Santa Clara : American Vacuum Sociey-Northern California Chapter, 2001.
出版年：2001