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Design test integration and packaging of MEMS/MOEMS 2003 : DTIP 2003 of MEMS & MOEMS 5-7 May 2003
出版社：Piscataway, N.J. : IEEE, c2003.
ISBN：078037066X
出版年：2003
作者：Symposium on Design,Test,Integration and Packaging of MEMS/MOEMS
资源类型：图书
细分类型：西文文献
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