Design, test, integration and packaging of MEMS/MOEMS 2003 : DTIP 2003 of MEMS & MOEMS, 5-7 May 2003

Design test integration and packaging of MEMS/MOEMS 2003 : DTIP 2003 of MEMS & MOEMS 5-7 May 2003

出版社：Piscataway, N.J. : IEEE, c2003.

ISBN：078037066X

出版年：2003

作者：Symposium on Design,Test,Integration and Packaging of MEMS/MOEMS

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