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Advances in mirror technology for x-ray EUV lithography laser and other applications : 7-8 August
出版社：Bellingham, Wash. : SPIE, c2004.
ISBN：0819450669
出版年：2003
作者：Conference on Advances in Mirror Technolgy for X-Ray,EUV Lithography,Laser,and Other Applications
资源类型：图书
细分类型：西文文献
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