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Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3 [2
出版社：Warrendale, Pa. : Materials Research Society ; New York, NY : Cambridge University Press, 2011.
ISBN：9781605112763
出版年：2011
作者：DelRio,Frank W.
资源类型：图书
细分类型：西文文献
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