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2014 International Conference on Planarization/CMP Technology (ICPT 2014) : Kobe Japan 19-21 Novem
出版社：Piscataway, N.J. : IEEE Computer Society, c2014.
ISBN：9781479955589
出版年：2014
作者：International Conference on Planarization/CMP Technology
资源类型：图书
细分类型：西文文献
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