Electron microscopy of semiconducting materials and ULSI devices : symposium held Apr. 15-16, 1998,

Electron microscopy of semiconducting materials and ULSI devices : symposium held Apr. 15-16 1998

出版社：Warrendale, Pa. : Materials Research Society, 1998.

ISBN：1558994297

出版年：1998

作者：Hetherington,Crispin,

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细分类型：西文文献

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