https://dds.las.ac.cn/service/document?appId=a1vacbnPuv9qJRzJvdNXfsesj9JbIa6e&appKey=sPBA4vANLzjnW1k5eufEcc4k7dxfNraW&ts=1763013335202&signature=3bc5543d43daf9ee9f12acbb33e45460&articleTitle=RF+MEMS+Switches+and+Integrated+Switching+Circuits&articleAuthor=Ai-Qun+Liu&publicationTitle=RF+MEMS+Switches+and+Integrated+Switching+Circuits&language=&publicationType=1&publishYear=2010&isn=9780387462615&publisher=Springer+US